| 000 | 00727nam a2200205Ia 4500 | ||
|---|---|---|---|
| 008 | 240729s9999 xx 000 0 und d | ||
| 022 | _a2578-3769 | ||
| 245 | 0 | _aJournal of Microelectronic Manufacturing | |
| 260 | _aUnited States | ||
| 260 | _bJommPublish | ||
| 650 | _a Electric apparatus and materials. Electric circuits. Electric networks | Technology | ||
| 650 | _a Electrical engineering. Electronics. Nuclear engineering | ||
| 650 | _a Industrial engineering. Management engineering | ||
| 650 | _a Production capacity. Manufacturing capacity | ||
| 650 | _a Technology (General) | ||
| 650 | _aTechnology | ||
| 856 | _uhttps://doaj.org/toc/186bed4c15014225b2fdb1b6c927071d | ||
| 942 | _2ddc | ||
| 942 | _cDOAJEJ | ||
| 999 |
_c70556 _d70556 |
||
| 945 |
_a1 _bMadushi Gamage _c1 _dMadushi Gamage |
||