000 00524nam a2200181Ia 4500
008 240729s9999 xx 000 0 und d
022 _a2590-0072
245 0 _aMicro and Nano Engineering
260 _aNetherlands
260 _bElsevier
650 _a Electrical engineering. Electronics. Nuclear engineering
650 _a Electronics | Technology
650 _a Technology (General)
650 _aTechnology
856 _uhttps://doaj.org/toc/f19756b070754acbbc310505b6b92ab7
942 _2ddc
942 _cDOAJEJ
999 _c70273
_d70273
945 _a1
_bMadushi Gamage
_c1
_dMadushi Gamage